| Vol. 3, No. 1, August 2006- Art. 3 |
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| A capacitance and optical method for the static and dynamic
characterization of MEMS devices |
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by
Eleonora Ferraris, Irene Fassi, Institute of Industrial
Technology and Automation, Biagio De Masi, STMicroelectronics,
Richard Rosing, Andrew Richardson, Lancaster University
Copyright
Copyright © Institute of Industrial Technology
and Automation, STMicroelectronics, University of Lancaster,
2005. Reprinted, with permission, from Proceedings of DTIP
2005, 1-3 June 2005, Montreux, Switzerland
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| Abstract
As the micro technology field expands, the need for simple
and standardized high precision procedures to evaluate device
functionality, reliability, and quality of MEMS devices increases.
In this paper, the application of two empirical methods suitable
for the static and the dynamic characterization of micrometersized
structures is proposed. The first methodology is based on capacitance
measurements and finds simple application in case of comb-finger
actuated devices. The second one is based on the Doppler phenomenon
combined with laser optical interferometry, allowing the characterization
of a wide range of structures. The methodologies are applied to
a reliability structure specifically designed at STMicroelectronics
for studying the fatigue behavior of the structural material involved
in the fabrication of their commercial products.
This case of study highlights how the techniques may be coupled
to usual design approaches for completing and verifying the information
given by theory and simulations, thus improving the entire development
cycle.
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